Investigating the surface layer of micro-features machined by Spark Assisted Chemical Engraving
نویسندگان
چکیده
منابع مشابه
Impact Analysis of Variation in Geometrical Features on Intrinsic Characteristics of Capacitive Micro-machined Ultrasonic Transducers
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ژورنال
عنوان ژورنال: IFAC-PapersOnLine
سال: 2019
ISSN: 2405-8963
DOI: 10.1016/j.ifacol.2019.10.049